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barium strontium titanate (BaxSr1-xTiO3) has attracted tremendous interest as a lead-free ferroelectric material for capacitor, microwave devices and RF-MEMS devices owing to its high tunable dielectric properties. However, obtaining BST film with an appropriate composition and structure is still challenging.

The lead-free BaxSr1-xTiO3 has interesting ferroelectric, pyroelectric, piezoelectric, and energy-harvesting properties. Moreover, it can be advantageously solution-deposited. However, the morphology and structure of solution-deposited BST films are highly dependent on the dilution of the precursor solution.

BST dielectric thin films exhibit high tunability characterized by a relatively low loss tangent and an extremely wide dielectric constant range. By optimizing the growth conditions, it is possible to control the crystalline structure and composition of BST films. This is especially important in tunable dielectric applications where the er value of a device can be varied with a DC voltage.

In the gemstone market, faceted strontium titanate is known for its “fire,” which surpasses that of natural and lab-created gems such as diamond, sapphire, YAG, GGG, CZ, and moissanite. This “fire” is produced by the stone’s ability to separate white light passing through it into a rainbow of colors, similar to a prism.

Typically, tunable capacitances are achieved by varying the dielectric thickness of the capacitor. However, this approach is limited in terms of scalability and power consumption. Hence, new dielectric materials with tunable capacitance are required. In this regard, a dielectric sputtering target for the synthesis of codoped barium strontium titanate is proposed in this article.